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RF Sputter¸¦ ÀÌ¿ëÇÑ InGaZnO(IGZO) ¹Ú¸·ÁõÂø ·¹Æ÷Æ® / 1. ½ÇÇè Á¦¸ñ 2. ½ÇÇè ¸ñÀû 3. ½ÇÇè ¿ø¸® 4. ½ÇÇè 5. ½ÇÇè°á°ú / 1. ½ÇÇè Á¦¸ñ RF Sputter¸¦ ÀÌ¿ëÇÑ InGaZnO(IGZO) ¹Ú¸·ÁõÂø¿¡ °üÇÑ ½ÇÇè Á¦¸ñÀº ÀüÀÚ±â±â¿Í µð½ºÇ÷¹ÀÌ ±â¼úÀÇ ¹ßÀü¿¡ ÇʼöÀûÀÎ ¼ÒÀçÀÎ IGZO ¹Ú¸·À» °íµµÈÇÏ´Â °úÁ¤À» ´Ù·é´Ù. IGZO´Â ³ôÀº À̵¿µµ, ³·Àº ÀüÇÏ À̵¿¼º, ±×¸®°í ¿ì¼öÇÑ ±¤ÇÐÀû Ư¼ºÀ» °¡Áø ¹Ý¡¦ |
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»êȹ°¹ÝµµÃ¼ IGZO / 1. Ž±¸ ÁÖÁ¦ 2. ÁÖÁ¦ ¼±Åà ÀÌÀ¯ 3. Ž±¸ ³»¿ë 4. ÁÖ¿ä ³»¿ë 5. ¹è¿îÁ¡ ¹× ´À³¤Á¡ / 1. Ž±¸ ÁÖÁ¦ IGZO(Indium Gallium Zinc Oxide)´Â ÃÖ±Ù ÀüÀÚ±â±â¿Í µð½ºÇ÷¹ÀÌ ±â¼ú¿¡¼ ÁÖ¸ñ¹Þ°í ÀÖ´Â Çõ½ÅÀûÀÎ ¹ÝµµÃ¼ Àç·áÀÌ´Ù. ÀÌ Àç·á´Â Àεã(Indium), °¥·ý(Gallium), ¾Æ¿¬(Zinc)ÀÌ Æ÷ÇÔµÈ »êȹ°·Î, ÁÖ·Î TFT(TThin Film Transistor)¿¡ È°¿ëµÈ´Ù. IGZOÀÇ ÁÖ¿ä ÀåÁ¡Àº¡¦ |
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IGZO TFT PR patterning, channel dimension ¹ßÇ¥ PPT / 1. Introduction 2. Present progress 3. Experiments process 4. Results 5. Summary & Plans / 1. Introduction IGZO TFT´Â Indium Gallium Zinc Oxide Thin Film TransistorÀÇ ¾àÀÚ·Î, Â÷¼¼´ë µð½ºÇ÷¹ÀÌ ±â¼ú¿¡ ÇʼöÀûÀÎ ±¸¼º ¿ä¼ÒÀÌ´Ù. IGZO´Â ³ôÀº ÀüÀÚ À̵¿µµ¿Í ¿ì¼öÇÑ ±¤ÇÐÀû Ư¼ºÀ» Áö´Ñ ¹ÝµµÃ¼ ¼ÒÀç·Î, OLED ¹× ¡¦ |
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IGZO »êȹ° TFT ¹®Á¦ÇöȲ ¹× °³¼±¹æ¾È ¿¬±¸°á°ú º¸°í¼(µð½ºÇ÷¹ÀÌ) / 1. °úÁ¦°³¿ä 1.1 °úÁ¦¼º¸³ÀÇ ¹è°æ 1.2 ÆÀº° ¼³°è¸ñÇ¥(°³³ä, Concept) ¹× ÇØ°áÇÏ°íÀÚ ÇÏ´Â ¹®Á¦Á¡ 1.3 Çö½ÇÀû Á¦ÇÑÁ¶°Ç 2. ¼³°è°úÁ¤ 3. ÃÖÁ¾¼³°è °á°ú¹° 3.1 ¼³°è°úÁ¦¹° Á¦½Ã 4. ¼³°è°á°ú¹° ¹× ÀÛÇ° Æò°¡ 5. °á·Ð 5.1 ÃÖÁ¾°á°ú¿Í ¼³°è¸ñÇ¥ÀÇ ºÎÇÕ¿©ºÎ ºÐ¼® 5.2 º» °úÁ¦¿¡ ÀÖ¾î ÇâÈÄ °³¼±µÇ¾î¾ß ÇÒ Á¡¡¦ |
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