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3. 湲곌린
ICP-MS�뒗 �떆猷뚯＜�엯�옣移�, sampling interface, ion optics, quadrupole 諛� 寃�異쒓린濡� �씠猷⑥뼱�졇 �엳�떎.
�뫒 �떆猷� 二쇱엯 �옣移�
�떆猷뚮�� ICP�뿉 �슚�쑉�쟻�쑝濡� �삉�븳 �옱�쁽�꽦�엳寃� 二쇱엯�븯�뒗 寃껋�� 留ㅼ슦 以묒슂�븳 �씪�씠�떎. �떆猷� 二쇱엯 諛⑸쾿��� �뿬�윭 媛�吏�媛� �엳�쑝硫� 媛��옣 �쟻�빀�븯怨� 醫뗭�� 諛⑸쾿�쓣 �븘�옒 �궗�빆�뱾�쓣 寃��넗�븯怨� �궃 �썑 �꽑�깮�빐�빞 �븳�떎.
�몺 �떆猷뚯쓽 �삎�깭(怨좎껜, �븸泥�, 湲곗껜)
�몼 �떆猷뚯쨷 遺꾩꽍�븯怨좎옄 �븯�뒗 �썝�냼��� 留ㅼ쭏 �썝�냼�쓽 �냽�룄 �닔以�
�몾 �궗�슜�븷 �닔 �엳�뒗 �떆猷뚯쓽 �뼇
�몿 �슂援щ릺�뒗 �젙諛��룄��� �젙�솗�룄
�뫀 泥섎━�빐�빞 �븷 �떆猷뚯쓽 �닔(�슂泥��릺�뒗 遺꾩꽍 �냽�룄)
fig.4 �뿉�뒗 媛� �떆猷뚯쓽 �삎�깭�뿉 �뵲�씪 �궗�슜�븷 �닔 �엳�뒗 �떆猷� 二쇱엯 諛⑸쾿�쓣 �뿴嫄고븯����떎. �떆猷뚯쓽 �삎�깭�뒗 �슜�븸�씠 媛��옣 留롪린 �븣臾몄뿉 媛��옣 蹂댄렪�쟻�쑝濡� �씠�슜�릺�뒗 諛⑸쾿��� �떆猷� �슜�븸�쓣 �븞媛쒖긽�깭濡� 留뚮뱾�뼱�꽌 ICP�뿉 �꽔�뼱二쇰뒗 寃껋씠�떎. �씠寃껋쓣 nebulization �씠�씪怨� �븯�뒗�뜲 �겕寃� pneumatic nebulization怨� ultrasonic nebulization �쓽 �몢 媛�吏�濡� �굹�닃 �닔 �엳�떎. pneumatic nebulizer �뒗 媛��옣 媛꾪렪�븯怨� �옄�룞�솕�븯湲� �돩�썙�꽌 留롮씠 �씠�슜�릺吏�留� �떆猷� 二쇱엯 �슚�쑉�씠 �궙�떎�뒗 寃� �씠�쇅�뿉�뒗 �떎�쓬怨� 媛숈�� �떒�젏�씠 �엳�떎.
�몺 �떆猷뚯쓽 �뼇�씠 1�럷 �씠�긽 �븘�슂
�몼 ICP�뿉 �뱾�뼱媛� �슜留�(�닔遺�)媛� oxide, hydroxide, hydrige�벑�쓽 遺꾩옄 �씠�삩�쓣 �삎�꽦�븯�뿬 spectral interference瑜� �씪�쑝�궡.
�몾 �떆猷� �슜�븸以� salt �쓽 �뼇�씠 1% �씠�긽�씪 �븣 nebulizer��� torch�쓽 capillary媛� 留됲�� �젙諛��룄媛� �뼥�뼱吏�.
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