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TEM�닾怨� �쟾�옄 �쁽誘멸꼍
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CONTENTS
TEM�씠��� 臾댁뾿�씤媛�
TEM�쓽 �썝由�
TEM�쓽 �떆�렪�젣�옉
TEM�쓽 �쟻�슜
�쁽誘멸꼍�쓽 鍮꾧탳
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1.TEM�씠���?
�닾怨쇱쟾�옄�쁽誘멸꼍(TEM:transmission electron microcope)��� �깮臾�, �쓽�븰, �옱猷� �벑 嫄곗쓽 紐⑤뱺 �옄�뿰怨쇳븰怨� 湲곗닠�쓽 �뿰援ъ뿉�꽌 �븘�닔�쟻�씤 �룄援щ줈 �솢�슜�릺怨� �엳�뒗�뜲,
�씠�뒗 �쟾�옄�쁽誘멸꼍�쓽 �빐�긽�젰�씠 �쎇�뼱�굹�꽌 誘몄떆�쟻�씤 �궡遺�援ъ“瑜� 怨좊같�쑉濡� �솗����븯�뿬 吏곸젒 愿�李고븷 �닔 �엳怨� 留덉씠�겕濡� �씠�븯�쓽 援�遺��쟻�씤 �쁺�뿭�쓽 �솕�븰議곗꽦源뚯���룄 �젙�솗�븯寃� 遺꾩꽍�븷 �닔 �엳湲� �븣臾몄씠�떎.
臾쇱쭏�쓽 誘몄꽭議곗쭅怨� 愿��젴�븯�뿬 怨좊텇�빐�뒫(High Resolution) �닾怨쇱쟾�옄�쁽誘멸꼍(HRTEM)�쑝濡쒕뒗 �썝�옄�겕湲� �젙�룄�쓽 誘몄꽭議곗쭅怨� �빟 1,000nm3 �씠�븯�쓽 �옉��� 遺��뵾瑜� 援ъ꽦�븯怨� �엳�뒗 誘몄꽭議곗쭅 援ъ꽦�꽦遺꾩뿉 ����븯�뿬 援ъ“��� �솕�븰�꽦遺꾩쓣 �젙�웾�솕�븷 �닔 �엳�떎.
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2.TEM�쓽 �썝由�
e-
e-
e-
backscattered e-
elemental contrast
secondary e-
surface topography
Primary or unscattered e-
projected sample image
transmission electron microscopy
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Transmission Electron Microscopy
Au/SiO2
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Transmission Electron Microscopy
Au
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3.TEM Sampling
<�슂援� 議곌굔>
1���(�깮�왂)
4. 臾쇰━�솕�븰�쟻 �븞�젙�꽦
5. �룊�깂�꽦
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nstruction of (110) surface of Au particle
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High Resolution Electron Microscopy
Rh/SiO2
Reduced
Oxidized
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Rh particles
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Electron-Specimen Interaction
Principle of E. M. lithography
Polymer resist
Substrate
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Electron Beam Lithography
Micropatterning and Microfabrication
PMMA resist
E-beam
develop resist
selectively etch
substrate
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�쁽誘멸꼍�쓽 鍮꾧탳
SEM
TEM
遺꾪빐�뒫
�씠李⑥쟾�옄�긽: 40A?媛��떆�쁺�뿭:2000A�옄�쇅�쁺�뿭:1000A
�씠濡좎쟻 遺꾪빐�뒫��� �빟 0.001nm�씠�굹 �깮臾쇳븰�쟻 �몴蹂몄뿉�꽌 �궗�슜�릺�뒗 遺꾪빐�뒫��� �빟 0.2nm(side entry), 0.14nm(top entry)�씠�떎.
�뼸�쓣 �닔 �엳�뒗 �젙蹂�
二쇰줈 �떆猷� �몴硫댁쓽 �젙蹂�
�꽭�룷�쓽 誘몄꽭援ъ“
�떆猷� �떒硫댁쓽 �젙蹂�
�썝�냼 �궡遺��쓽 �젙蹂�
援�遺��쟻�씤 �쁺�뿭�쓽 �솕�븰�쟻 議곗꽦
蹂닿툒�쑉
(�긽����쟻�쑝濡�)�겕�떎
�옉�떎
愿�李� ����긽
二쇰줈 �떆猷뚯쓽 �몴硫�
二쇰줈 �썝�냼 �궡遺�
怨듯넻�젏
�넂��� �뿉�꼫吏��쓽 �쟾�옄鍮�(electron beam)�쓣 �엯�궗臾쇱쭏濡� �궗�슜
�엯�궗�쟾�옄��� 遺꾩꽍臾쇱쭏怨쇱쓽 �긽�샇�옉�슜�뿉 �쓽�빐 �쁺�뼢�쓣 諛쏆�� �쟾�옄瑜� 諛쏆븘�꽌 遺꾩꽍
�엯�궗�쟾�옄�쓽 沅ㅻ룄��� 鍮뷀겕湲곕�� �옄湲곗옣怨� �쟾湲곗옣�쓣 �씠�슜�븯�뿬 議곗젙
李⑥씠�젏-援ъ“�긽�쓽 李⑥씠
? �떆猷� 以�鍮� �옉�뾽-
? �쓳�슜 遺꾩빞
? 遺꾪빐�뒫
? �쟾�옄鍮붿쓽 �뿉�꼫吏�
�쟾�옄�꽑�씠 �떆猷뚮㈃�쐞瑜� 硫댁긽�쑝濡�
二쇱궗(Scanning) �븷 �븣 �떆猷뚯뿉�꽌 諛쒖깮�릺�뒗
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